• 产品名称: PVD1688装饰涂层设备

主要技术参数与配置:

1.真空室容积:φ1688*1200
2.工位:20个/24个/28个或按需提供,工件回转最大直径180mm
3.可装可移动平面靶:2支
4.上盖预留:8对φ70靶位,其中门两侧4对可与2对φ100靶互换
5.中间两侧可装10套电弧靶或2支线性离子源

Configuration:

Ⅰ.Vacuum chamber volume:Φ1688mm*h1200mm
Ⅱ.station:20/24/28 or provided on demand,Maximum diameter of workpiece rotation:180mm
Ⅲ.Movable plane target:2
Ⅳ.The upper cover is reserved: 8 pairs of φ70 targets, 4 pairs on both sides of the door can be exchanged with 2 pairs of target φ100.

Ⅴ.10 sets of arc targets or 2 linear ion sources can be installed on both sides.