• 产品名称: sline14A立式多功能溅射生产线

立式传动结构,驱动全部采用伺服电机,可柔性控制基片运行速度及相邻基片位置关系,该设备主要用于CIGS太阳能薄膜电磁的Mo层(背电极层)及ZnO+ZnS、AZO层(窗口层)的沉积。

The vertical drive structure, the drive all uses the servo motor, can control the operating speed of the substrate flexible and the relationship between the adjacent substrate position. The equipment is mainly used for the deposition of the Mo layer (back electrode layer) of the CIGS solar film and the ZnO+ZnS and AZO layer (window layer).