• 产品名称: PVD12512 装饰涂层设备

主要技术参数与配置:

1.真空室容积:φ1250*1200
2.工位:16个或18个,工件回转最大直径160mm
3.靶、弧:通用接口设计,可按需配置
4.推荐配置:4对70靶+10支弧靶的IP黑机型或1对φ100靶+2支平面靶+10支弧靶的IP金机型

Configuration:

Ⅰ.Vacuum chamber volume:Φ1250mm*h1200mm
Ⅱ.station:16or18,Maximum diameter of workpiece rotation:160mm
Ⅲ.Target, arc: general interface design, can be configured on demand
Ⅳ.Recommended configuration: 4 pairs of 70 target +10 arc target IP black model or 1 pairs of 100 target +2 support plane target +10 arc target IP gold model.